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Gas | Concentration | Response |
---|---|---|
Phosphine (PH3) | ||
Arsine | 150 ppb | 0 ppb |
Arsine | 2000 ppb | 1200 ppb* |
Silane | 1000 ppb | 900 ppb |
Diborane | 300 ppb | 105 ppb |
Germane | 600 ppb | 510 ppb |
NH3 | 100 ppm | 0 ppm |
NO | 100 ppm | 0 ppm |
SO2 | 5 ppm | 1 ppm |
CO | 1000 ppm | 1 ppm |
CO2 | 50 000 ppm | 0 ppm |
H2 | 1000 ppm | 30 ppm |
H2S | 25 ppm | 5 ppm |
HCN | 10 ppm | 0,6 ppm |
HCl | 10 ppm | 0,2 ppm |
Methane | 50 000 ppm | 0 ppm |
Ethylene | 100 ppm | 1,8 ppm |
Isobutylene | 250 ppm | 0 ppm |
Hexane, n- | 1500 ppm | 0 ppm |
Benzene | 100 ppm | 0 ppm |
Toluene | 100 ppm | 0 ppm |
Ethylene oxide | 10 ppm | 0 ppm |
CF2Cl2 | 100 ppm | 0 ppm |
Note: All data above are valid for sensors by RAE Systems.
*Response after 9 minutes exposure. CF = 1,7 average, tested in range 500 to 3000 ppb AsH3.